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( a ) LNE’s metrological AFM, the national reference instrument and keystone in the traceability chain for nanometre-scale measurements; ( b ) 2D standard grating (S1932B80) with a pitch of 10 µm, etched on a silicon chip; and ( c ) 3D pattern grating P900H60 developed in collaboration with CNRS/C2N. The grating pitch (along the X and Y axes) is equal to (899.9 ± 2.0) nm with a step height equal to (68.2 ± 1.0) nm.

Journal: Nanomaterials

Article Title: Strategy for Ensuring the Metrological Traceability of Nanoparticle Size Measurements by SEM

doi: 10.3390/nano14110931

Figure Lengend Snippet: ( a ) LNE’s metrological AFM, the national reference instrument and keystone in the traceability chain for nanometre-scale measurements; ( b ) 2D standard grating (S1932B80) with a pitch of 10 µm, etched on a silicon chip; and ( c ) 3D pattern grating P900H60 developed in collaboration with CNRS/C2N. The grating pitch (along the X and Y axes) is equal to (899.9 ± 2.0) nm with a step height equal to (68.2 ± 1.0) nm.

Article Snippet: This 2D standard grating, supplied by Agar Scientific has a pitch of 10 µm and is etched on a silicon chip with lateral dimensions of 5 mm × 5 mm and a thickness of 0.5 mm.

Techniques: